Phosphoryl fluoride
IUPAC names
Phosphoryl trifluoride
Phosphorus trifluoride oxide
Other names
  • Phosphorus oxyfluoride
  • Phosphorus oxide trifluoride
  • Phosphorus(V) oxide trifluoride
  • Trifluorophosphine oxide
  • Trifluorophosphine P-oxide
3D model (JSmol)
ECHA InfoCard 100.033.419 Edit this at Wikidata
EC Number
  • 236-776-4
  • InChI=1S/F3OP/c1-5(2,3)4
  • InChI=1/F3OP/c1-5(2,3)4
  • F[P+](F)(F)[O-]
  • FP(F)(F)=O
Molar mass 103.9684 g/mol
Appearance Colourless gas
Boiling point −39.7 °C (−39.5 °F; 233.5 K)
Solubility Reacts with alcohol and acid, soluble in diethyl ether and hydrocarbons
1.76 D[1]
Tetrahedral at the P atom
Occupational safety and health (OHS/OSH):
Main hazards
Poison, corrosive, can form HF on contact with H2O
GHS labelling:
GHS05: CorrosiveGHS06: ToxicGHS07: Exclamation markGHS08: Health hazard
H302, H314, H330, H372
P260, P264, P270, P271, P280, P284, P301+P312, P301+P330+P331, P303+P361+P353, P304+P340, P305+P351+P338, P310, P314, P320, P321, P330, P363, P403+P233, P405, P501
NFPA 704 (fire diamond)
NFPA 704 four-colored diamondHealth 3: Short exposure could cause serious temporary or residual injury. E.g. chlorine gasFlammability 0: Will not burn. E.g. waterInstability 2: Undergoes violent chemical change at elevated temperatures and pressures, reacts violently with water, or may form explosive mixtures with water. E.g. white phosphorusSpecial hazards (white): no code
Safety data sheet (SDS) ICSC 0190
Related compounds
Related compounds
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).

Phosphoryl fluoride (commonly called phosphorus oxyfluoride) is a compound with the chemical formula POF3. It is a colorless gas that hydrolyzes rapidly. It has a critical temperature of 73 °C and a critical pressure of 4.25 bars.[1]

Synthesis and reactions

Phosphorus oxyfluoride is prepared by partial hydrolysis of phosphorus pentafluoride.

Phosphorus oxyfluoride is the progenitor of the simple fluorophosphoric acids by hydrolysis. The sequence starts with difluorophosphoric acid:

POF3 + H2O → HPO2F2 + HF

The next steps give monofluorophosphoric acid and phosphoric acid:

HPO2F2 + H2O → H2PO3F + HF
H2PO3F + H2O → H3PO4 + HF

Phosphoryl fluoride combines with dimethylamine to produce dimethylaminophosphoryl difluoride (H3C−)2N−P(=O)F2 and difluorophosphate and hexafluorophosphate ions.[2]


  1. ^ a b "Phosphoryl fluoride".
  2. ^ Cavell, R. G. (1968). "Chemistry of phosphorus fluorides. Part III. The reaction of thiophosphoryl-fluoride with dimethylamine and some properties of the dimethylaminothio- phosphoryl fluorides". Canadian Journal of Chemistry. 46 (4): 613. doi:10.1139/v68-100.