Yttrium oxyfluoride
3D model (JSmol)
  • [Y+3].[O-2].[F-]
Molar mass 123.903 g·mol−1
Appearance white powder
Density 5.18 g/cm3
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).

Yttrium oxyfluoride is an inorganic chemical compound with the formula YOF.[1] Under normal conditions, the compound is a colorless solid.[2]


Yttrium oxyfluoride may be formed in the decomposition of crystalline hydrate of yttrium fluoride upon heating to 900 °C in a vacuum:

Yttrium oxyfluoride can also be made by hydrolysis of yttrium fluoride with superheated steam at 800 °C:

Physical properties

Yttrium oxyfluoride forms colorless crystals of tetragonal crystal system; its cell parameters are: a = 0.3910 nm, c = 0.5431 nm. According to hexagonal crystal family, the cell parameters are: a = 0.38727 nm, c = 1.897 nm, Z = 6.


Stable yttrium oxyfluoride material is used for inner walls of plasma process equipment.[3][4]


  1. ^ Mann, A. W.; Bevan, D. J. M. (1970). "The crystal structure of stoichiometric yttrium oxyfluoride, YOF". Acta Crystallographica. B26 (12): 2129–2131. doi:10.1107/S0567740870005496. Retrieved 16 June 2017.
  2. ^ Рипан, Р.; Четяну, И. (1992). Неорганическая химия (in Russian).
  3. ^ Shiba, Yoshinobu (January 2017). "Stable yttrium oxyfluoride used in plasma process chamber". Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 35 (2): 021405. Bibcode:2017JVSTA..35b1405S. doi:10.1116/1.4975143.
  4. ^ Tsunoura, Toru; Yoshida, Katsumi; Yano2, Toyohiko; Kishi, Yukio (2 May 2017). "Fabrication, characterization, and fluorine-plasma exposure behavior of dense yttrium oxyfluoride ceramics". Japanese Journal of Applied Physics. 56 (6S2): 06HC02. Bibcode:2017JaJAP..56fHC02T. doi:10.7567/JJAP.56.06HC02. S2CID 126342556.((cite journal)): CS1 maint: numeric names: authors list (link)